A Monolithic Integrated Gas Chromatography Chip with Gas Chromatographic Column and Helium Discharge Ionization Detector
10.19756/j.issn.0253-3820.251073
- VernacularTitle:气相色谱柱和氦放电离子化检测器单片集成气相色谱芯片的研制
- Author:
Yu-Chen ZHU
1
;
Shao-Jie MA
;
Wen-Bo LI
;
Zhi-Rui LI
;
Bin ZHAO
;
Fei FENG
Author Information
1. 中国科学院上海微系统与信息技术研究所,传感技术国家重点实验室,上海 200050;中国科学院大学材料科学与光电工程中心,北京 100049
- Keywords:
Monolithic integration;
Micro gas chromatography column;
Micro helium discharge ionization detector;
HKUST-1 stationary phase;
Micro electromechanical system
- From:
Chinese Journal of Analytical Chemistry
2025;53(7):1064-1071
- CountryChina
- Language:Chinese
-
Abstract:
A monolithic integrated gas chromatography chip,consisting of a micro gas chromatography column(μGCC)and a micro helium discharge ionization detector(μHDID)was proposed.The chip was fabricated using micro electromechanical system(MEMS)technique,and its sensitivity was improved from two aspects.On one hand,open tubular column was selected as the separation device,and the auxiliary helium channel width of μHDID was modulated based on the microchannel width of the μGCC to match the flow rates of μHDID and μGCC.On the other hand,the electrode structure inside the μHDID collection zone was optimized,a bias electrode group around the collection electrode was constructed,and the ion collection efficiency was improved.After coating HKUST-1 as the stationary phase,the monolithic integrated gas chromatography chip could achieve baseline separation and detection of light hydrocarbon gas mixture(methane,ethane,propane,andn-butane),with a detection limit for propane as low as 25 pg.The chip could carried out test under temperature-programmed conditions,with a resolution of 9.24 for ethane and propane.
