A Pneumatic Micro-valve with Sandwich Structure Based on Micro-electro-mechanical System
10.19756/j.issn.0253-3820.251047
- VernacularTitle:一种基于微机电系统的具有三明治结构的开关型气动微阀
- Author:
Shao-Jie MA
1
;
Wen-Bo LI
;
Yu-Chen ZHU
;
Zhi-Rui LI
;
Bin ZHAO
;
Fei FENG
Author Information
1. 中国科学院上海微系统与信息技术研究所,传感技术国家重点实验室,上海 200050;中国科学院大学材料科学与光电工程中心,北京 100049
- Keywords:
Gas chromatography;
ON/OFF type pneumatic micro-valve;
Flow control;
Micro-electro-mechanical system
- From:
Chinese Journal of Analytical Chemistry
2025;53(5):758-764
- CountryChina
- Language:Chinese
-
Abstract:
In this study,an ON/OFF type micro-valve with a sandwich(glass-silicon-glass)structure was designed and fabricated based on the micro-electro-mechanical system(MEMS)technique.The deformable membrane of this micro-valve was prepared on the silicon on insulator(SOI)substrate and sealed using Si-Si bonding and anodic bonding methods.The micro-valve had high-temperature stability and was suitable for integration with other gas chromatography components.The deformable membrane with a thickness of 10 μm was processed on the top silicon of the SOI substrate.The flow control of the micro-valve could be achieved by changing the driving pressure applied to the deformable membrane to deform it.Compared with polymer membranes,the deformable membrane prepared on the top layer silicon of SOI had better temperature stability and could be released using the deep reactive ion etching technique after silicon-silicon bonding,avoiding deformation during the preparation process.In addition,due to the small gap between the membrane and the inlet/outlet holes,the dead volume of the microvalve was very small.The test results indicated that the micro-valve achieved flow control and ON/OFF functions with good repeatability.
