Objective To develop a facility to sterilize the heat-sensitive precise medical surgical instruments which can not resist high temperature and high pressure. Methods We used electromagnetic field of high frequency as excitation source for plasma,vacuumized the instrument,pumped in the peroxide,maintained the pressure in the instrument within a certain range,and then applied magnetic RF electric field,causing glow discharge and generating ambiplasma. The microorganism could be quickly destroyed under the synergistic effect of peroxide and low -temperature ambiplasma. Results The facility can sterilize the medical instruments within 45 minutes,enhance the surgical security and reduce the cost. Conclusion By controlling the primary parameters such as temperature,vacuity and time,the sterilization process can be finished in a low temperature safely,easily and quickly,so it is gradually accepted by the medical department.