The development and applicationof the MEMS
- VernacularTitle:微机电系统发展及其应用
- Author:
Xing-Ju MENG
;
Mei-Sheng SHI
;
- Publication Type:Journal Article
- Keywords: micro-electro-mechanical system(MEMS); MEMS unit; micromachines
- From: Chinese Medical Equipment Journal 2003;0(S2):-
- CountryChina
- Language:Chinese
- Abstract: This paper introduces the development of the MEMS at home and abroad,besides the key technology,the application in medicine and military about the MEMS also expounded in detail.