The Research on High-Density Flexible Microelectrode Array of Retinal Prosthesis Based on MEMS Technology
10.3969/j.issn.1671-7104.2013.06.007
- VernacularTitle:基于MEMS技术的高密度视网膜假体微电极阵列的研制
- Author:
Gang FENG
1
;
Xiaohong SUI
;
Yu WANG
;
Gang LI
;
Xinyu CHAI
Author Information
1. 上海交通大学生物医学工程学院
- Keywords:
visual prosthesis;
retina prosthesis;
micro electrode array;
MEMS;
high density
- From:
Chinese Journal of Medical Instrumentation
2013;(6):407-410
- CountryChina
- Language:Chinese
-
Abstract:
The paper proposed a new method to design and fabricate a flexible neural microelectrode arrays(MEA) for retinal prosthesis, the Ion-Beam technology was intruduced to decrease the width of conductive wires and the distances between wires, a high density MEA(120 microelectrodes with a matrix of 10×12) was fabricated on a single layer of polymer from this. The MEA was proved to possess a fine electrochemical property. In vitro test, the average impedance of MEA on 1 kHz was 16 kΩ±2 kΩand the average phase difference was-85o±3o.
